Environmentally aware semiconductor chip fabrication

The number of large-scale Artificial Intelligence systems have exploded since 2020 driving innovation through their use and contributing to the growing demand for IC chips. Whether GPUs for parallel processing, CPUs for computation or memory for storage, the number of IC’s fabricated will grow and, without intervention, the associated environmental impact will as well. In 2021, imec initiated its Sustainable Semiconductors Technology and Systems (SSTS) program to help our partners reach their environmental sustainability targets. We have developed a bottom-up virtual fab to identify key high impact areas to target for development. Using this tool, key areas for industry focus become clear: process efficiency, effective abatement on high GWP process gases, low-carbon intensity electricity sources, and lower impact supply chain, specifically Si wafer production. Armed with information and working collaboratively throughout the supply chain, IC chips can be produced while minimizing their overall environmental impact. We know where to start.